![Challenges of 4H-SiC MOSFETs on the C(000-1) Face toward the Achievement of Ultra Low On-Resistance]()
Challenges of 4H-SiC MOSFETs on the C(000-1) Face toward the Achievement of Ultra Low On-ResistanceFukuda, Kenji; Harada, Shinsuke; Senzaki, Junji; Okamoto, Mitsuo; Tanaka, Yasunori; Kinoshita, Akimasa; Kosugi, Ryouji; Kojima, Kazu; Kato, Makoto; Shimozato, Atsushi; Suzuki, Kenji; Hayashi, Yusuke; Takao, Kazuto; Kato, Tomohisa; Nishizawa, Shinichi; Yatsuo, Tsutomu; Okumura, Hajime; Ohashi, Hiromichi; Arai, Kazuo · Materials Science Forum · 2009