Dynamic binary collision simulation of focused ion beam milling of deep trenchesG. Hobler; D. Kovač · 2011

Coupled BC/kLMC simulations of the temperature dependence of implant damage formation in siliconG. Otto; D. Kovač; G. Hobler · 2005

Multiscale approach for the analysis of channeling profile measurements of ion implantation damageG. Hobler; G. Otto; D. Kovač; L. Palmetshofer; K. Mayerhofer; K. Piplits · 2005

Modeling of amorphous pocket formation in silicon by numerical solution of the heat transport equationD. Kovač; G. Otto; G. Hobler · 2005

Investigation of the impact of defect models on Monte Carlo simulations of RBS/C spectraD. Kovač; G. Hobler · 2006