Effect of ambient gas on structural and optical properties of titanium oxynitride films
- 作者Sushant K. Rawal; Amit Kumar Chawla; Vipin Chawla; R. Jayaganthan; Ramesh Chandra
- 卷第256卷
- 期第13期
- 印刷ISSN0169-4332
- 文件大小1186.38KB
- 发表时间2010
- DOI10.1016/j.apsusc.2010.01.096
- 页码4129-4135
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