![Atomic layer deposition of high-k dielectrics on carbon nanoparticles]()
Atomic layer deposition of high-k dielectrics on carbon nanoparticlesTamm, Aile; Peikolainen, Anna-Liisa; Kozlova, Jekaterina; Mändar, Hugo; Aidla, Aleks; Rammula, Raul; Aarik, Lauri; Roosalu, Kaspar; Lu, Jun; Hultman, Lars; Koel, Mihkel; Kukli, Kaupo; Aarik, Jaan · Thin Solid Films · 2013