From FIB-SIMS to SIMS-FIB. The prospects for a 10 nm lateral resolution SIMS instrument with full FIB functionality
- 作者David S. McPhail; Libing Li; Richard J. Chater; Nikolai Yakovlev; Hweeleng Seng
- 卷第43卷
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小288.35KB
- 发表时间2011
- DOI10.1002/sia.3468
- 页码479-483
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