![Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases]()
Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gasesDonko, Zoltan; Derzsi, Aranka; Korolov, Ihor; Hartmann, Peter; Brandt, Steven William; Schulze, Julian; Berger, Birk; Koepke, Mark E; Bruneau, Bastien; Johnson, Erik V; Lafleur, Trevor; Booth, Jean Paul; Gibson, Andrew Robert; O'Connell, Deborah; Gans, Timo · Plasma Physics and Controlled Fusion · 2017