![Low energy (100 eV) C+ ion doping into GaAs using combined ion beam and molecular beam epitaxial technology]()
Low energy (100 eV) C+ ion doping into GaAs using combined ion beam and molecular beam epitaxial technologyIida, Tsutomu; Makita, Yunosuke; Kimura, Shinji; Winter, Stefan; Yamada, Akimasa; Shibata, Hajime; Obara, Akira; Niki, Shigeru; Fons, Paul; Tsai, Yushin; Uekusa, Shin-ichiro · Applied Physics Letters · 1993