![Formation of buried SiO2 layer by oxygen implanted into Si/Ge and Si/Si0.5Ge0.5 substrates]()
Formation of buried SiO2 layer by oxygen implanted into Si/Ge and Si/Si0.5Ge0.5 substratesTang, Y. S.; Zhang, Jingping; Hemment, P. L. F.; Sealy, B. J.; Liu, Hengda; Castle, J. E.; Newstead, S. M.; Powell, A. R.; Whall, T. E.; Parker, E. H. C. · Journal of Applied Physics · 1990