![Sub-Half Micron Elevated SourceDrain NMOSFETS by Low Temperature Selective Epitaxial Deposition]()
Sub-Half Micron Elevated SourceDrain NMOSFETS by Low Temperature Selective Epitaxial DepositionSun, J.; Bartholomew, R. F.; Bellur, K.; O'Neil, P. A.; Srivastava, A.; Violette, K. E.; Oztiirk, M. C.; Osburn, C. M.; Masnari, N. A. · MRS Proceedings · 1996