Intellectual Property and Assessing its Financial Value || Copyright
- 作者,
- 文件大小403.70KB
- 发表时间2014
- DOI10.1016/b978-1-84334-792-7.50013-0
Block copolymer technology applied to nanoelectronicsTallegas, Salomé; Baron, Thierry; Gay, Guillaume; Aggrafeil, Claire; Salhi, Billel; Chevolleau, Thierry; Cunge, Gilles; Bsiesy, Ahmad; Tiron, Raluca; Chevalier, Xavier; Navarro, Christophe; Aissou, Karim; Otsuka, Issei; Halila, Sami; Fort, Sébastien; Borsali, Redouane · physica status solidi (c) · 2013
Fabrication of SiC Nanopillars by Inductively Coupled SF<sub>6</sub>/O<sub>2</sub> PlasmaChoi, Ji Hoon; Latu-Romain, Laurence; Dhalluin, Florian; Chevolleau, Thierry; Salem, Bassem; Baron, Thierry; Chaussende, Didier; Bano, Edwige · Materials Science Forum · 2012
Hexagonal Faceted SiC Nanopillars Fabricated by Inductively Coupled SF<sub>6</sub>/O<sub>2</sub> Plasma MethodChoi, J.H.; Latu-Romain, Laurence; Baron, Thierry; Chevolleau, Thierry; Bano, Edwige · Materials Science Forum · 2012
Comparative Study on Dry Etching of α- and β-SiC Nano-PillarsChoi, J.H.; Latu-Romain, Laurence; Bano, Edwige; Henry, Anne; Lee, Won Jae; Chevolleau, Thierry; Baron, Thierry · Materials Science Forum · 2013
Low-k Integration Using Metallic Hard MasksJoubert, O.; Possémé, Nicolas; Chevolleau, Thierry; David, Thibaut; Darnon, M. · Solid State Phenomena · 2012
Prospects for dielectric constant reduction in integrated circuits interconnectsDarnon, Maxime; Posseme, Nicolas; Chevolleau, Thierry; David, Thibaut L. · MRS Proceedings · 2014
MAM 2012 (selected contributions) March 11–14, Grenoble, France Minatec CampusMAITREJEAN, Sylvain; FARCY, Alexis; CHEVOLLEAU, Thierry · Microelectronic Engineering · 2013