![Development of a fast atom beam gun for surface-activated bonding]()
Development of a fast atom beam gun for surface-activated bondingMorisaki, Ryo; Hirai, Yuuki; Oka, Chiemi; Mizoshiri, Mizue; Yamazaki, Takahiro; Sakurai, Junpei; Hirai, Takami; Takahashi, Tomonori; Tsuji, Hiroyuki; Hata, Seiichi · Precision Engineering · 2020