![SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - <title>Reproducibility data on SUMMiT</title>]()
SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - <title>Reproducibility data on SUMMiT</title>Limary, Siv; Stewart, Harold D.; Irwin, Lloyd W.; McBrayer, John; Sniegowski, Jeffry J.; Montague, Stephen; Smith, James H.; de Boer, Maarten P.; Jakubczak, Jerome F.; Smith, James H.; Karam, Jean Michel · 1999