![SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - 130-nm node mask development]()
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - 130-nm node mask developmentChabala, Jan M.; Weaver, Suzanne; Alexander, David W.; Lu, Maiying; Kim, Nam-Wook; Cole, Damon M. · 2000