![Structural and Electrical Characterization of FeSix – Layers (1≤ X ≤2) Prepared by RTP of Fe Layers Sputtered on Si (100)]()
Structural and Electrical Characterization of FeSix – Layers (1≤ X ≤2) Prepared by RTP of Fe Layers Sputtered on Si (100)Líbezný, M.; Poortmans, J.; Amesz, P. H.; Donaton, R. A.; Larsen, K. Kyllesbech; Vandenabeele, P.; Jonckx, F.; Maex, K.; Nijs, J. · MRS Proceedings · 1995