SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 2 March 2003)] Smart Structures and Materials 2003: Smart Sensor Technology and Measurement Systems - Damage detection in structural materials using a polarimetric fiber optic sensor
- 作者Thursby, Graham; Inaudi, Daniele; Udd, Eric; Sorazu, Borja; Dong, Fengzhong; Betz, Daniel C.; Culshaw, Brian
- 卷第5050卷
- 印刷ISSN0277-786X
- 文件大小389.31KB
- 发表时间2003
- DOI10.1117/12.484758
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] MOEMS Display and Imaging Systems - <title>Characterization of spatial light modulators for microlithography</title>Duerr, Peter; Dauderstaedt, Ulrike; Kunze, Detlef; Auvert, Marine; Bakke, Thor; Schenk, Harald; Lakner, Hubert; Urey, Hakan · 2003
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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - <title>Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography</title>Dinger, Udo; Seitz, Guenther; Schulte, Stefan; Eisert, Frank; Muenster, Christian; Burkart, Stefan; Stacklies, Siegfried; Bustaus, Christian; Hoefer, Hubert; Mayer, Maximilian; Fellner, Bernhard; Hocky, Oliver; Rupp, Markus; Riedelsheimer, Klaus; Kuerz, Peter; Khounsary, Ali M.; Dinger, Udo; Ota, Kazuya · 2004