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Optimization of MEMS capacitive accelerometerBenmessaoud, Mourad; Nasreddine, Mekkakia Maaza · Microsystem Technologies · 2013
Novel microstructured evaporation deviceWibel, Wolf; Maikowske, Stefan; Brandner, Juergen J. · Microsystem Technologies · 2015
HAMR HDD shock responsesHuang, Lidu; Suzuki, Kenzi; Huang, Fu-Ying; Hirano, Toshiki; Stipe, Barry · Microsystem Technologies · 2014
Tools for ultrasonic hot embossingLiao, S.; Gerhardy, C.; Sackmann, J.; Schomburg, W. K. · Microsystem Technologies · 2015
ForewordBharat Bhushan · Microsystem Technologies · 2014
Hybrid micro electrostatic actuatorHailu, Zewdu; He, Siyuan; Ben Mrad, Ridha · Microsystem Technologies · 2016
Special issue WaferBond’13Knechtel, Roy; Niklaus, Frank; Michel, Bernd · Microsystem Technologies · 2015
Editorial special issue HARMNST 2013Mohr, Jürgen; Göttert, Jost; Michel, Bernd · Microsystem Technologies · 2014