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Dimensionelle Metrologie mittels Rastersondenmikroskopie (Dimensional Metrology based on Scanning Probe Microscopy)Herrmann, K.; Koenders, Ludger; Danzebrink, H.-U.; Hasche, Klaus; Wilkening, Günter; Pohlenz, F.; Kuetgens, U.; Mirandé, W.; Yacoot, A. · tm Technisches Messen · 2002