![[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - A three-dimensional electrostatic/electret micro power generator for low acceleration and low frequency vibration energy harvesting]()
[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - A three-dimensional electrostatic/electret micro power generator for low acceleration and low frequency vibration energy harvestingTao, K.; Liu, S. W.; Miao, J. M.; Lye, S. W. · 2014