![[IEEE 2007 International Microsystems, Packaging, Assembly and Circuits Technology - Taipei, Taiwan (2007.10.1-2007.10.3)] 2007 International Microsystems, Packaging, Assembly and Circuits Technology - CMOS compatible directional microphone]()
[IEEE 2007 International Microsystems, Packaging, Assembly and Circuits Technology - Taipei, Taiwan (2007.10.1-2007.10.3)] 2007 International Microsystems, Packaging, Assembly and Circuits Technology - CMOS compatible directional microphonePo-Hsun Sung, ; Jen-Yi Chen, ; Kai-hsiang Yen, ; Chia-yu Wu, · 2007