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Plasma Process. Polym. 8/2012G. Dingemans; M. C. M. van de Sanden; W. M. M. Kessels · 2012
Composition and bonding structure of plasma-assisted ALD Al2O3 filmsV. Verlaan; L. R. J. G. van den Elzen; G. Dingemans; M. C. M. van de Sanden; W. M. M. Kessels · 2010
Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping filmG. Dingemans; M. C. M. van de Sanden; W. M. M. Kessels · 2011
Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer depositionG. Dingemans; R. Seguin; P. Engelhart; M. C. M. van de Sanden; W. M. M. Kessels · 2010