海量图书期刊资源,随时随地畅享阅读乐趣
Energetic Nanoporous Silicon DevicesCurrano, L.J.; Churaman, W.A. · Journal of Microelectromechanical Systems · 2009
Two-Axis Microstage SystemBeverly, P.; Sivakumar, G.; Dallas, T. · Journal of Microelectromechanical Systems · 2008
Novel Capacitive Pressure SensorBakhoum, Ezzat G; Cheng, Marvin H M · Journal of Microelectromechanical Systems · 2010
Surface micromachined piezoelectric accelerometers (PiXLs)DeVoe, D.L.; Pisano, A.P. · Journal of Microelectromechanical Systems · 2001
Photopatternable Superhydrophobic Nanocomposites for MicrofabricationHong, Lingfei; Pan, Tingrui · Journal of Microelectromechanical Systems · 2010
Deformable Polymer Adaptive Optical MirrorsFriese, C.; Zappe, H. · Journal of Microelectromechanical Systems · 2008
Microorganisms for MEMSXiong, Xiaorong; Lidstrom, Mary E.; Parviz, Babak A. · Journal of Microelectromechanical Systems · 2007
A planar electroosmotic micropumpChuan-Hua Chen, ; Santiago, J.G. · Journal of Microelectromechanical Systems · 2002