![[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Amorphous Co-Ti alloy as a single layer barrier for Co local interconnect structure]()
[IEEE 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Jose, CA, USA (2016.5.23-2016.5.26)] 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - Amorphous Co-Ti alloy as a single layer barrier for Co local interconnect structureHosseini, Maryamsadat; Koike, Junichi; Sutou, Yuji; Zhao, Larry; Lai, Steven; Arghavani, Reza · 2016