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Oxidation of silicon by low energy oxygen bombardmentWilliams, J. S.; Petravić, M.; Svensson, B. G.; Conway, M. · Journal of Applied Physics · 1994
Isotope effects for mega-electron-volt boron ions in amorphous siliconSvensson, B. G.; Ridgway, M. C.; Petravić, M. · Journal of Applied Physics · 1993
The influence of cavities and point defects on boron diffusion in siliconJ. Wong-leung; J. S. Williams; M. Petravić · 1998
Surface recession and oxidation of silicon during bombardment by low energy oxygen ionsSvensson, B. G.; Mohadjeri, B.; Petravić, M. · Journal of Applied Physics · 1994
Using doping superlattices to study transient-enhanced diffusion of boron in regrown siliconJones, K. S.; Elliman, R. G.; Petravić, M. M.; Kringho̸j, P. · Applied Physics Letters · 1996
Compositional changes on GaN surfaces under low-energy ion bombardment studied by synchrotron-based spectroscopiesP. N. K. Deenapanray; M. Petravić; K. Kim; B. Kim; G. Li · 2003
Charge transport in magnetronsRossnagel, S. M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1987
Biomolecules and surfacesRatner, Buddy D. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1990
Studies in differential chargingBarr, Tery L. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1989
Material selection for hard coatingsHolleck, H. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1986
Hollow cathode magnetronWang, Zhehui; Cohen, Samuel A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1999
Nanostructured materials for supercapacitorsMeyyappan, M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2013
Design of functional coatingsHegemann, D.; Oehr, C.; Fischer, A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2005
Depth profile optimizationNaumkin, A. V. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1994