![SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - <title>Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS</title>]()
SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - <title>Comparison of rapid thermal processing and furnace processing for quarter-micrometer CMOS</title>El-Kareh, Badih; Ghatalia, Ashwin; Kellam, Mark D.; Maillot, Philippe; Osburn, Carlton M.; Zhang, Xiaoqiang; Bondur, James A.; Elliott, Kiefer; Hauser, John R.; Kwong, Dim-Lee; Ray, Asit K. · 1994