![[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Towards multiscale fluidic channel networks via internal oxidation and oxide etching based on self-assembled silicon-on-nothing structures]()
[IEEE 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Shanghai, China (2016.1.24-2016.1.28)] 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) - Towards multiscale fluidic channel networks via internal oxidation and oxide etching based on self-assembled silicon-on-nothing structuresSong, Jungki; Je, Jinsol; Lee, Jungchul · 2016