Metrological atomic force microscope using a large range scanning dual stageJong-Ahn Kim; Jae Wan Kim; Chu-Shik Kang; Tae Bong Eom · 2009

A metrological scanning force microscope used for coating thickness and other topographical measurementsBienias, M.; Gao, S.; Hasche, K.; Seemann, R.; Thiele, K. · 1998

Measurement of micro-roughness using a metrological large range scanning force microscopeG. Dai; L. Jung; F. Pohlenz; H. Danzebrink; R. Krüger-sehm; K. Hasche; G. Wilkening · 2004

SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Scanning Microscopy Instrumentation - <title>Application of a 2-D atomic force microscope system to metrology</title>Nyyssonen, Diana; Landstein, Laszlo; Coombs, E.; Kino, Gordon S. · 1992

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 29 April 2013)] Scanning Microscopies 2013: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - A Large range metrological atomic force microscope and its uncertainty analysisGao, S.; Li, Q.; Li, W.; Lu, M.; Shi, Y.; Postek, Michael T.; Newbury, Dale E.; Platek, S. Frank; Maugel, Tim K. · 2013

SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida, United States (Monday 25 April 2011)] Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Study of a large range metrological atomic force microscope applied for calibration of a vertical PZT stagePostek, Michael T.; Wang, S. H.; Tan, S. L.; Newbury, Dale E.; Platek, S. Frank; Xu, G.; Joy, David C.; Maugel, Tim K. · 2011