Characterization of Cu/Ti Multi-Layered Structure by Improved Sputter Crater Method
- 期刊名称Japanese Journal of Applied Physics
- 作者Hatano, Takeshi; Nakamura, Keikichi; Asada, Yuji; Ogawa, Keiichi; Oguchi, Atsushi
- 卷第25卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小589.86KB
- 发表时间1986-6-20
- DOI10.1143/jjap.25.912
- 页码912-913
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