![Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas]()
Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmasBruneau, B.; Korolov, I.; Lafleur, T.; Gans, T.; O'Connell, D.; Greb, A.; Derzsi, A.; Donkó, Z.; Brandt, S.; Schüngel, E.; Schulze, J.; Johnson, E.; Booth, J.-P. · Journal of Applied Physics · 2016