Effects of processing on the characteristics of SrBi[sub 2]Ta[sub 2]O[sub 9] films prepared by metalorganic decomposition
- 期刊名称Journal of Applied Physics
- 作者Li, Aidong; Wu, Di; Ling, Huiqin; Yu, Tao; Wang, Mu; Yin, Xiaobo; Liu, Zhiguo; Ming, Naiben
- 卷第88卷
- 期第2期
- 印刷ISSN0021-8979
- 文件大小718.94KB
- 发表时间2000
- DOI10.1063/1.373773
[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Polysilicon microstructuresFarooqui, M.M.; Evans, A.G.R. · 1991
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[IEEE IEEE Micro Electro Mechanical Systems - Nara, Japan (30 Jan.-2 Feb. 1991)] [1991] Proceedings. IEEE Micro Electro Mechanical Systems - Ultrasonically induced microtransportMoroney, R.M.; White, R.M.; Howe, R.T. · 1991
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