Hafnium oxide layers derived by photo-assisted sol–gel processing
J.J. Yu; Q. Fang; J.-Y. Zhang; Z.M. Wang; I.W. Boyd
- 作者J.J. Yu; Q. Fang; J.-Y. Zhang; Z.M. Wang; I.W. Boyd
- 印刷ISSN0169-4332
- 文件大小122.14KB
- 发表时间2003
- DOI10.1016/s0169-4332(02)01424-1
- 页码676-681