[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - MEMS Technology- from Automotive to Consumer
- 作者Marek, Jiri
- 文件大小2241.24KB
- 发表时间2007
- DOI10.1109/memsys.2007.4433012
- 页码59-60
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