Nickel silicide formation by electroless technique for ULSI technology
- 作者Anuj Kumar; Mukesh Kumar; Amanpal Singh; Satinder Kumar; Dinesh Kumar
- 卷第87卷
- 期第3期
- 印刷ISSN0167-9317
- 文件大小458.30KB
- 发表时间2010
- DOI10.1016/j.mee.2009.07.021
- 页码286-289
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