![[IEEE 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium - Atlanta, GA, USA (7-10 Oct. 2001)] 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263) - Micromachined unimorphs and bimorphs]()
[IEEE 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium - Atlanta, GA, USA (7-10 Oct. 2001)] 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263) - Micromachined unimorphs and bimorphsFarlow, R.; Galbraith, W.; Kelly, S.; Hayward, G. · 2001