![[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Bi-layer encapsulation of utah array based nerual interfaces by atomic layer deposited Al<inf>2</inf>O<inf>3</inf> and parylene C]()
[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Bi-layer encapsulation of utah array based nerual interfaces by atomic layer deposited Al<inf>2</inf>O<inf>3</inf> and parylene CXie, Xianzong; Rieth, Loren; Cardwell, Ryan; Sharma, Rohit; Yoo, Je-Min; Diweka, Mohit; Tathireddy, Prashant; Solzbacher, Florian · 2013