![[IEEE 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual - Orlando, FL, USA (30 April-3 May 2001)] 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167) - Reliability of a MEMS torsional ratcheting actuator]()
[IEEE 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual - Orlando, FL, USA (30 April-3 May 2001)] 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167) - Reliability of a MEMS torsional ratcheting actuatorTanner, D.M.; Walraven, J.A.; Barnes, S.M.; Smith, N.F.; Bitsie, F.; Swanson, S.E. · 2001