![[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Practical Gate-First Metal Gate/Dual High-k CMOS Integration with Low Threshold Voltages]()
[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Practical Gate-First Metal Gate/Dual High-k CMOS Integration with Low Threshold VoltagesNara, Yasuo; Mise, Nobuyuki; Kadoshima, Masaru; Morooka, Tetsu; Kamiyama, Satoshi; Matsuki, Takeo; Sato, Motoyuki; Ono, Tetsuo; Aoyama, Takayuki; Eimori, Takahisa; Ohji, Yuzuru · 2008