![SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - <title>Development of characterization tools for reliability testing of micro-electro-mechanical system actuators</title>]()
SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - <title>Development of characterization tools for reliability testing of micro-electro-mechanical system actuators</title>Smith, Norman F.; Eaton, William P.; Tanner, Danelle M.; Allen, James J.; Lawton, Russell A.; Miller, William M.; Lin, Gisela; Ramesham, Rajeshuni · 1999