![Use of Selective Area Defect Creation for Isolation of III-V Multilayer Structures]()
Use of Selective Area Defect Creation for Isolation of III-V Multilayer StructuresPearton, S. J.; Ren, F.; Fullowan, T. R.; Katz, A.; Hobson, W. S.; Abernathy, C. R.; Lothian, J. R.; D'asaro, L. A.; Elliman, R. G.; Ridgway, M. C.; Jagadish, C.; Williams, J. S. · MRS Proceedings · 1992