PCD dresser for dressing CMP polyurethane pads
- 期刊名称International Journal of Abrasive Technology
- 作者Tsai, M.Y.; Sung, J.C.
- 卷第3卷
- 期第1期
- 印刷ISSN1752-2641
- 电子ISSN1752-265X
- 文件大小1671.29KB
- 发表时间2010
- DOI10.1504/ijat.2010.032462
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